We report high-efficiency high-power uv generation at 266 nm by frequency quadrupling of Nd laser using two deuterated KDP crystals. An angle-tuned type-II phase-matched (eoe-interaction) deuterated KDP crystal is used for doubling 1.064 μm and a temperature-tuned 90° phase-matched deuterated KDP crystal is used, for the first time, for doubling 532 nm to 266 nm. Results indicate that an average uv power of several watts with an over-all quadrupling efficiency of around 20% is obtainable, and that high peak uv power on the order of 10 GW with an efficiency of greater than 35% can be expected for subnanosecond pulses. The high peak uv power is potentially useful for fusion studies.
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