Spatial overlap between the electromagnetic fields and the analytes is a key factor for strong light-matter interaction leading to high sensitivity for label-free refractive index sensing. Usually, the overlap and therefore the sensitivity are limited by either the localized near field of plasmonic antennas or the decayed resonant mode outside the cavity applied to monitor the refractive index variation. In this paper, by constructing a metal microstructure array-dielectric-metal (MDM) structure, a novel metamaterial absorber integrated microfluidic sensor is proposed and demonstrated in terahertz (THz) range, where the dielectric layer of the MDM structure is hollow and acts as the microfluidic channel. Tuning the electromagnetic parameters of metamaterial absorber, greatly confined electromagnetic fields can be obtained in the channel resulting in significantly enhanced interaction between the analytes and the THz wave. A high sensitivity of 3.5 THz/RIU is predicted. The experimental results of devices working around 1 THz agree with the simulation ones well.The proposed idea to integrate metamaterial and microfluid with a large light-matter interaction can be extended to other frequency regions and has promising applications in matter detection and biosensing.2

The past few decades have witnessed a substantial increase in terahertz (THz) research. Utilizing THz waves to transmit communication and imaging data has created a high demand for phase and amplitude modulation. However, current active THz devices, including modulators and switches, still cannot meet THz system demands. Double-channel heterostructures, an alternative semiconductor system, can support nanoscale two-dimensional electron gases (2DEGs) with high carrier concentration and mobility and provide a new way to develop active THz devices. In this Letter, we present a composite metamaterial structure that combines an equivalent collective dipolar array with a double-channel heterostructure to obtain an effective, ultrafast, and all-electronic grid-controlled THz modulator. Electrical control allows for resonant mode conversion between two different dipolar resonances in the active device, which significantly improves the modulation speed and depth. This THz modulator is the first to achieve a 1 GHz modulation speed and 85% modulation depth during real-time dynamic tests. Moreover, a 1.19 rad phase shift was realized. A wireless free-space-modulation THz communication system based on this external THz modulator was tested using 0.2 Gbps eye patterns. Therefore, this active composite metamaterial modulator provides a basis for the development of effective and ultrafast dynamic devices for THz wireless communication and imaging systems.

Utilizing terahertz (THz) waves to transmit data for communication and imaging places high demands on phase modulation. However, until now, it is difficult to realize a more than 100° phase shift in the transmission mode with one-layer structure. In this paper, a ring-dumbbell composite resonator nested with VO2 nanostructures is proposed to achieve the large phase shift. It is found that in this structure a hybrid mode with an enhanced resonant intensity, which is coupled by the L-C resonance and dipole resonance has been observed. Applying the photoinduced phase transition characteristics of VO2, the resonant intensity of the mode can be dynamically controlled, which leads to a large phase shift in the incident THz wave. The dynamic experimental results show that controlling the power of the external laser can achieve a phase shift of up to 138° near 0.6 THz using this one-layer VO2 nested composite structure. Moreover, within a 55 GHz (575–630 GHz) bandwidth, the phase shift exceeds 130°. This attractive phase shift modulation may provide prospective applications in THz imaging, communications, and so on.

Terahertz (THz) modulators are always realized by dynamically manipulating the conversion between different resonant modes within a single unit cell of an active metasurface. In this Letter, to achieve real high-speed THz modulation, we present a staggered netlike two-dimensional electron gas (2DEG) nanostructure composite metasurface that has two states: a collective state with massive surface resonant characteristics and an individual state with meta-atom resonant characteristics. By controlling the electron transport of the nanoscale 2DEG with an electrical grid, collective-individual state conversion can be realized in this composite metasurface. Unlike traditional resonant mode conversion confined in meta-units, this state conversion enables the resonant modes to be flexibly distributed throughout the metasurface, leading to a frequency shift of nearly 99% in both the simulated and experimental transmission spectra. Moreover, such a mechanism can effectively suppress parasitic modes and significantly reduce the capacitance of the metasurface. Thereby, this composite metasurface can efficiently control the transmission characteristics of THz waves with high-speed modulations. As a result, 93% modulation depth is observed in the static experiment and modulated sinusoidal signals up to 3 GHz are achieved in the dynamic experiment, while the −3 dB bandwidth can reach up to 1 GHz. This tunable collective-individual state conversion may have great application potential in wireless communication and coded imaging.

Terahertz (THz) radiation has received much attention during the past few decades for its potential applications in various fields, such as spectroscopy, imaging, and wireless communications. To use terahertz waves for data transmission in different application systems, the efficient and rapid modulation of terahertz waves is required and has become an in-depth research topic. Since the turn of the century, research on metasurfaces has rapidly developed, and the scope of novel functions and operating frequency ranges has been substantially expanded, especially in the terahertz range. The combination of metasurfaces and semiconductors has facilitated both new opportunities for the development of dynamic THz functional devices and significant achievements in THz modulators. This paper provides an overview of THz modulators based on different kinds of dynamic tunable metasurfaces combined with semiconductors, two-dimensional electron gas heterostructures, superconductors, phase-transition materials, graphene, and other 2D material. Based on the overview, a brief discussion with perspectives will be presented. We hope that this review will help more researchers learn about the recent developments and challenges of THz modulators and contribute to this field.