Fiber Fabry-Perot interferometers (FFPIS) utilizing internal mirrors have been developed to sense temperature, strain. acoustic waves and other physical perturbations in structural materials, and have been successfully embedded in composites and in metals. The construction, performance and application of the FFPI sensors to smart structures are described
The use of an optical fiber Fabry–Perot interferometric temperature sensor for monitoring substrate temperature in a rf sputtering system is demonstrated. The sensor head consists of a continuous length of single mode silica fiber which contains two internal mirrors a distance of 1.08 cm apart to form the interferometer cavity. The laser light source for the sensor is located outside the vacuum system and connected to the sensor head via a fiber optic feedthrough. The accuracy of the sensor was 0.05 °C in this experiment, but considerable improvement is possible with better signal averaging techniques. The fiber optic sensor provided substrate temperature information during rf plasma excitation, when a nearby thermocouple ceased to function due to electromagnetic interference.
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