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A series of unsymmetrically substituted oligosilanes were synthesized via stepwise introduction of different substituents to α-chloro-ω-hydrooligosilanes. The reactions of α-chloro-ω-hydrooligosilanes with organolithium or Grignard reagents gave hydrooligosilanes having various alkyl, alkenyl, alkynyl and aryl groups. Thus-obtained hydrooligosilanes were converted into alkoxyoligosilanes by ruthenium-catalyzed dehydrogenative alkoxylation with alcohols.

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