Electromechanical properties of PbTiO3 ceramics modified by the partial substitution of rare earths for Pb, particularly, (Pb, Ln) (Ti, Mn) O3 (Ln = La, Pr, Nd, Sm, or Gd) ceramics, are examined. It is found that the Sm substitution for Pb dramatically increases the ratio of electromechanical coupling factor of the thickness dilatational mode to that of the planar extensional mode. Extensive studies of the resonant properties of rectangular strip resonators make it clear that the Sm-substituted PbTiO3 ceramics are very useful for high-frequency array transducer applications. It is also shown that the pulse responses of array transducers can be improved using Sm substituted PbTiO3 ceramics instead of the other PbTiO3 ceramics studied here.
BaTiO3 thin films were fabricated using an rf-magnetron sputtering technique and an oxide target. In spite of depositing on an amorphous fused quartz substrate, the preferentially oriented thin films were obtained without any post-annealing process. The preferred orientation of the thin films changed with sputtering gas pressure, gas composition and substrate temperature. At a lower gas pressure, the thin films crystallized well and preferentially oriented to the [100] direction. With increasing gas pressure, the preferred orientation changed to (110). On the other hand, at a lower substrate temperature or higher argon partial pressure, the preferred orientation changed to (111). The variation of the preferred orientation, lattice constant, and crystallite size with sputtering conditions was explained by assuming a thermal-vibration model.
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