 Nowadays three-dimensional (3D) printing has been widely used for producing geometrically complex 3D structures from a broad range of materials such as ceramics, metals, polymers, semiconductors, etc. Although it has been demonstrated that a fabrication resolution as high as ~100 nm can be achieved in 3D printing based on two photon polymerization (TPP), the end product size of TPP is typically on millimeter scale limited by the short working distance of high-numerical-aperture focal lens. Here we present a method based on simultaneous spatiotemporal focusing (SSTF) of the femtosecond laser pulses that enables to fabricate centimeter-scale 3D structures of fine features with TPP. We also demonstrate an isotropic spatial resolution which can be continuously tuned in the range of ~10 μm and ~40 μm by only varying the power of femtosecond laser, making this technique extremely flexible and easy to implement. We fabricate several Chinese guardian lions of a maximum height of 0.6 cm and a Terra Cotta Warrior of a height of 1.3 cm using this method.

Three-dimensional integrated circuits (3D ICs) are an attractive replacement for conventional 2D ICs as high-performance, low-power-consumption, and small-footprint microelectronic devices. However, one of the major remaining challenges is the manufacture of high-aspect-ratio through-silicon vias (TSVs), which is a crucial technology for the assembly of 3D Si ICs. Here, we present the fabrication of high-quality TSVs using a femtosecond (fs) 1.5-μm Bessel beam. To eliminate the severe ablation caused by the sidelobes of a conventional Bessel beam, a fs Bessel beam is tailored using a specially designed binary phase plate. We demonstrate that the tailored fs Bessel beam can be used to fabricate a 2D array of approximately ∅10-μm TSVs on a 100-μm-thick Si substrate without any sidelobe damage, suggesting potential application in the 3D assembly of 3D Si ICs.

Abstract:We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 m.