Dynamic scaling behavior has been observed during the growth of Fe films on Fe(OOl) using highresolution low-energy electron diffraction technique. The interface width grows with time according to the power law vv -r^ with ^=0.22 ±0.02. Time-invariant self-aifine behavior on the short-range scale has also been observed with the roughness exponent a =0.79 ±0.05. The time-invariant characteristic agrees with the recent prediction based on the dynamic scaling theory. From the measured growth exponents, we suggest that the growth of Fe film is more consistent with a conservative growth process.PACS numbers: 64.60.Ht, 61.14.Hg, 68.55.JkThe far-from-equilibrium dynamics of interface growth has attracted much attention in recent years. Theoretically, it is generally recognized that the surface morphology and dynamics of a growing interface exhibit simple dynamic scaling behavior despite the complication of the growth processes [1]. In thin-film growth, if nonlocal effects are negligibly small, the random fluctuation and the local smoothing effects (such as diffusion or side growth) will play key roles in the evolution of the surface morphology. The competition between fluctuation and smoothing eventually reaches a balance on a relatively short-range scale, so that the local surface morphology is statistically stationary (time-invariant) and self-affine. However, the competition does not reach a balance on a long-range scale. The global surface morphology thus proceeds to a steady growth with the evolution of vertical roughening and lateral coarsening. Two correlation lengths are assigned to describe the growth process: the mean surface height fluctuation w (called the interface width), which is a measure of the vertical roughness, and the lateral correlation length ^, which characterizes the coarsening size. In the scaling regime, the roughening and coarsening grow with time according to power laws w(t)'-t^ and (5(/)'-/^^". The exponent p is related to the growth process and a describes the surface ''roughness.'' The generic dynamic scaling aspects of a complex growing interface can be represented by an equal-time height-height correlation function [1],
H{Tj)={lh(Tj)-h(0j)]^)=2lw(t)Vg2(r/r7)2«, for r«^(/) ,
2[w(t)]\for r»^(/),where r = (x,>^) and h(T,t)=z denote respectively the lateral and vertical coordinates of surface atomic positions. The scaling function g(A') = 1, for A'» 1, provides a direct measure of the time-dependent interface width wit). As A'« 1, g(X) ^A'^" and this gives //(r,0 a selfaffine form in the short range. The time-invariant quantity rf^^w ~'^" is interpreted physically as the average terrace size during crystalline growth. As reported previously, the short-range time-invariant characteristics, shown in Eq. (1), can lead to a time-invariant diffraction structure factor in reciprocal space [2].The growth models can be classified in two types: the nonconservative and the conservative growth processes. In the nonconservative dynamics, as in the Eden model [3] or the ballistic deposition model [4], t...