Diamond-like carbon (DLC) has been of interest as a promising coating for protection and insulating layer in micro-electromechanical systems due to high hardness, wear resistance, transparency in IR range, chemical inertness and biocompatibility. The interfacial effect on thermal transport is studied for DLC films deposited on Al 2 O 3 substrates with an ion gun method. Thermal conductivity of DLC thin films is measured with a 3ω method. DLC films show the thickness-dependent thermal conductivity, which is understood with the interfacial thermal resistance between DLC thin film and Al 2 O 3 substrate. The interfacial thermal resistance and thermal conductivity of bulk DLC are determined with the measured thickness-dependent thermal conductivity of DLC films.
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