The photoluminescence (PL) spectrum of iron disilicide (β-FeSi 2 ) was enhanced by increasing the density of epitaxial grains grown at 650 °C on Si(111) substrates with a Au layer. The Au-Si liquidus phase obtained from the Au-Si eutectic reaction contributed to the formation of epitaxial β-FeSi 2 grains on the Si(111) surface. The density of the epitaxial β-FeSi 2 grains on the Si(111) surface decreased with increasing thickness of the Au layer, while the grain size increased from 0.5-2 to 20-50 µm. It is suggested that the excitation volume of the β-FeSi 2 is a key point that determines the PL intensity.
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