Piezoelectric pump design is regarded as a hot research topic in the microfluidic field, and has been applied in liquid cooling, precision machinery and other relevant domains. The valveless piezoelectric pump becomes an important branch of the piezoelectric pump, because it successfully avoids the problem of “pump-lagging of valve” during the valve piezoelectric pump processing. This paper summarizes the development of valveless piezoelectric pumps, and introduces some different configurations of valveless piezoelectric pumps. The structure and material of all kinds of valveless piezoelectric pumps are elaborated in detail, and also the output performance of the pump is evaluated and analyzed with the variations in flow rate and output pressure as reference. By comparing the flow of different types of valveless piezoelectric pumps, the application of valveless piezoelectric pumps is also illustrated. The development tendency of the valveless piezoelectric pump is prospected from the perspective of structure design and machining methods, which is expected to provide novel ideas and guidance for future research.
In order to alleviate the problem of low back pressure of valveless piezoelectric pumps, a novel piezoelectric screw pump was proposed, manufactured and tested. It used the movable cavity formed by screw thread fit to realize liquid transportation. The theoretical model was used to analyze the factors affecting the performance of the piezoelectric screw pump. The geometrical parameters of the piezoelectric vibrator were optimized by the finite element method, and a prototype was made for testing. The test verifies the results calculated by the above analysis. The results showed that under the driving frequency of 13.8 kHz, the maximum back pressure was 6.70 kPa and the maximum flow was 750 µl min −1 . Moreover, this novel piezoelectric screw pump is simple in structure, and can maintain the state of liquid circuit by self-locking when power is off, and has higher reliability.
A novel bellows-type piezo-hydraulic actuator was proposed, manufactured and tested in this study. The influence of water on the piezoelectric vibrator was analyzed and the output performance of the actuator was tested. The results show that the maximum average velocities of the big bellows-type actuator (BBA) and the small bellows-type actuator (SBA) are 17.24 and 27.23 at 13.9 kHz. The maximum output forces are 0.163 N and 0.044 N, respectively. The self-locking forces of BBA and SBA are 0.059 N and 0.009 N. The characteristics of the actuator are simple structure, large displacement, and self-locking when power is off.
In order to apply a valve-less piezoelectric pump in navigation equipment, this work first revealed a valve-less piezoelectric pump with arc-shaped tubes and then researched the relationship between the main structural parameters of arc-shaped tubes and the output flow rate. According to the velocity difference between clockwise and counterclockwise directions of liquid in circular arc-shaped tubes, the flow characteristics of liquid in circular arc-shaped tubes are analyzed in this paper, and the velocity difference model and flow equation of a piezoelectric pump are established. By using three-dimensional printing technology, five types of prototypes with different parameters were made, and the experimental research was carried out. The results show that at the optimal frequency, the pump output flow is the largest. The output flow is proportional to the driving voltage, the base circle radius, and the cross section area of the pipe. The low-cost and miniaturized navigation equipment made by using the piezoelectric pump has potential application value in unmanned aerial vehicle and intelligent vehicle navigation.
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