Highly (111)-oriented and conformal iridium (Ir) films were deposited by a liquid source metalorganic-chemical-vapor-deposition process on various substrates. An oxygen-assisted pyrolysis of (methylcyclopentadienyl) (1,5-cyclooctadiene) Ir precursor at a wide range of substrate temperatures (Tsub) between 300 and 700 °C was used. At a low Tsub of 350 °C, the randomly oriented polycrystalline films exhibited an I111/I200 x-ray intensity ratio of 6. However, the films deposited at Tsub = 700 °C on native SiO2 and amorphous SiO2 surfaces were highly oriented with the I111/I200 ratios of 277 and 186, respectively. The transmission electron microscopy study revealed continuous, dense, and faceted microstructures of Ir films. Also, the step coverage of Ir on TiN (64%) was higher than that on amorphous SiO2 (50%) surfaces.
Sol-gel derived SrBi,T%O,(SBT) thin films, stoichiometric and titanium doped, were applied to pure platinum substrates and annealed in oxygen and forming gas. The films were characterized using SEM, EDS, and AES. The data showed that bismuth diffused into the platinum layer during the crystallization anneal in oxygen. Additionally, the forming gas anneal promoted the growth of tall bismuth-platinum towers that originated from the platinum layer and grew through the SBT film. Surrounding the towers, local areas of increased roughness and porosity were observed on the SBT film.
The effect of design and fabrication parameters on the polarization dependence of the splitting ratio in directional couplers produced in LiTaO3 by Zn diffusion has been investigated experimentally at a wavelength of 1558 nm. The directional couplers featured various combinations of waveguide width, separation gaps between waveguides, bending angle, and diffusion conditions. In each case the coupling region was 3.5 mm long. Of particular interest was the identification of parameter sets for which the sum of power splitting ratios from TE and TM inputs equals unity at the output, as needed for electro-optic tunable filters with relaxed beam-splitter requirements.
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