As high-tech science has developed, the need of semiconductor is required constantly. However, there are many processes which use a great deal of poisonous gas in the semiconductor process, so the dangerousness by a gas leak is latent in these processes. Especially, the accident of toxic gas is almost made by ammonia and chlorine. Therefore this report estimates the damage by the leak of ammonia and chlorine used in LPCVD system.
This paper aims at the design of wheel and axle with cap. The cap is conceptually designed by using TRIZ/CAE. Wheel axle is used at railway vehicle to safety and it is always investigated to reduce the railway vehicle weight. The cap has hollow shaft with the material of SM45C. Cap is located in the bearing seat of wheel and axle. The cap becomes durable within the allowable stress of EN13103, 13104 standard. In this study, the strength of wheel and axle with cap becomes higher than that of hollow shaft. The weight of wheel and axle with cap becomes lower by about 6.75 percent than that of solid shaft. The confidence of wheel and axle with cap can be improved by comparing with solid and hollow shafts.
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