The frequency-scanning-interferometry-based (FSI-based) absolute ranging technology is a type of ranging technology possessing a high precision and no ranging blind area, so it can be used for non-cooperative targets. However, due to a tiny movement of a target, the Doppler shift and the phase modulation are introduced into the beat signal which results in ranging accuracy decrease. In order to solve this problem, first the model of vibration effect is established, and then the beat signals of two adjacent scanning periods are processed to produce a signal that is immune to vibration. The proposed method is verified by the experiments, and the experimental results show that the effect of vibration compensation is better for the target with a lower vibration velocity and at a lower vibration frequency (lower than 6 Hz). When the target is subjected to a sinusoidal vibration with an amplitude of 10 μm at a frequency of 1 Hz, by using the proposed method the standard deviation is reduced from 775 to 12 μm. Moreover, in the natural environment, by using vibration compensation the standard deviation is reduced from 289 to 11 μm.
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