We fabricated step-edge Josephson junctions of YBa2Cu3OT-d on MgO substrates by a pulsed laser deposition method for high frequency applications. On the basis of temperature dependence of critical current, noticeable deterioration has not been observed in a step-edge area. The dynamic resistance was between 2 and 3 fl under the superconducting critical temperature. A deviation from a resistively shunted junction model was observed, which implies the excess current not flowing through Josephson junctions. PACS: 85.25.CpKey words: pulsed laser deposition, oxide superconductor, step-edge Josephson junction, high frequency superconducting device I IntroductionAmong high T¢ (critical temperature) superconductors, YBa2Cu3Or-d(YBCO) has been most intensively studied. YBCO films have started to be studied soon after the discovery of a YBCO ceramic superconductor. The YBCO film is a key material for the application such as microwave filters, superconducting quantum interference devices and single magnetic flux quantum devices. YBCO films are nowadays applied to ultrashort electromagnetic pulse radiation [1,2]. A superconducting optical flux-trap memory with a femtosecond pulsed laser was demonstrated using YBCO films [3].It is of importance to obtain YBCO films in good quality for the application to superconducting devices. As for a deposition technique [4], magnetron sputtering [5, 6] and pulsed laser deposition (PLD) [7,8] have been widely used.In order to obtain YBCO films with good qualits; the lattice mismatch between the film and the substrate should be small. From this point of view, SrTiO3 is the most favorable candidate as a substrate. However, SrTiO3 is a ferroelectric material that is not suitable for a substrate of high frequency devices. The best candidate to the substrate for high frequency YBCO devices is MgO without doubt though the lattice mismatch is as large as 7.7%. It is also an advantage that MgO is chemically inactive to YBCO.Josephson junction is an important technology to superconducting device applications. In Josephson junctions, several kinds of structures were studied [9]: solderblobs, crossed wires, point contacts, bridges and step edges. Among these types, step-edge Josephson junctions have not been so intensively treated so far, but this type of the junction has such a simple structure as to be attractive to study. In this
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