Co/Cu multilayers were electrodeposited in a single electrolyte using the pulse potential method and the layer thickness was precisely controlled in accordance with Faraday's law. X-ray diffraction revealed that multilayers with layer thicknesses in the range of 25–100 nm consisted of fcc-Co and fcc-Cu phases. For layers thinner than 10 nm, the fcc-Co and fcc-Cu phases merged to form a single crystal phase. When the layers were <1 nm, one diffraction peak of the single crystal phase became proportionally higher as the layer became thinner. The surface structure of multilayers also varied with the layer thickness
A new sensor has been developed for examining surface topography, especially in a case that is difficult to examine by optical method. This sensor measures the surface topography by bringing a cantilever beams that is similar to a comb into contact with a sample and measuring the deflection of the cantilever as it is scanned across the surface. And this sensor can measure the surface topography at one time scan across the surface. The cantilever beams were processed from phosphor bronze foil. The piezoresisitive effect of silicon thin film was used to sense the deflection of the cantilever. We fabricated the sensor that had 20 and 160 cantilever beams, 200 pm pitch, 7 mm length, 30 µm thickness, and applied to examine the surface topography of a copper plating surface on printed circuit board. We could observe the surface topography with 10 µm resolution of depth direction.
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