Gauge Repeatability and Reproducibility (Gauge R&R , G.R.R) is of great importance for checking measurement system precision, traditional average-range G.R.R test involves equipment variation (EV) and appraiser variation (AV), which is not appropriate for current modern automatic measurement tools. In this paper, we designed different test experiments on film thickness (THK) and critical dimension (CD) metrology and statistically analyzed different variances impact on G.R.R. From THK G.R.R experiment ANOVA analysis, it can be seen that time interval and measurement process have no significant effect on G.R.R result, and the equipment repeatability variation is the major variation source. From CD G.R.R experiment ANOVA analysis, it can be checked that, G.R.R has significant time dependence of data collection due to test wafer changed. As a conclusion, not only appraiser’s variation but also time interval has less impact on metrology G.R.R of semiconductor wafer manufacturing process.
In this paper, an effective baking methodology to remove thin film stability monitor wafer surface contamination is reported. We consider baking temperature, baking time, and time interval between baking and measurement as three key factors for methodology optimization study. A long-time and durative experiment is designed for the obtaining of a suitable and feasible baking condition, in which design of experiment (DOE) is applied for the data analysis and the study of baking effect on wafer thickness change. From DOE analysis, we finally take the baking condition of 140/ 60/210 as the optimal pre-treatment condition to monitor the stability of thickness metrology tools.
Abstract: By studying the reliability distribution of CNC lathe, it is possible to solve the problem of poor reliability and short life of CNC lathe, which can also reveal the weak links, key elements and components in the system design. The mathematical model of NC lathe is established by using Arlins distribution method, and the importance degree of each subsystem in CNC lathe is analyzed quantitatively based on the reliability allocation criterion. The reliability of all subsystems in the mechanical system and the feasibility of the Arlins distribution method are verified by an example.
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