Microstructure and corrosion resistance of plasma source ion nitrided austenitic stainless steelIn order to develop a corrosion-free halogen gas delivery system for use in semiconductor manufacturing, Cr 2 O 3 passivation of ferritic and austenitic stainless steels has been investigated. It has been shown that a Cr 2 O 3 layer can be formed on an electropolished ͑EP͒ surface of ferritic 26Cr-1Mo stainless steel by oxidation above 600°C, but excellent corrosion resistance performance to Cl 2 gas can be obtained only by oxidation above 700°C. On the other hand, on the EP surface of austenitic SUS 316L, a corrosion-resistant Cr 2 O 3 layer is not formed by oxidation even up to 800°C.
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