We investigated the electrical properties and optical quality of two layers a titanium dioxide (TiO₂) selective layer and a sol-gel silica cladding layer for use as coating layers for nonlinear optic (NLO) polymers in electro-optic (EO) polymer/TiO₂ multilayer slot waveguide modulators. We used a simple ellipsometric reflective technique developed by Teng and Man to measure the electro-optic (EO) coefficients of poled thin films of an EO polymer in an EO multilayer device. The Pockels coefficient was enhanced up to 226 and 198 pm/V at wavelengths of 1.31 and 1.55 μm, respectively, when optimally poled with TiO₂ and a sol-gel silica cladding.
We report lower half wave voltage (V π) in an electro-optic (EO) polymer/TiO2 multilayer slot waveguide modulator using low-index EO polymer. Thicker EO polymer sandwiched between two 100-nm-tick TiO2 layers shows the mode confinement factor of 68 %, which results in lower half wave voltage (V π) of 2.0 V for the electrode length (Le) of 10-mm at 1550nm wavelength.
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