The slot structure has great advantages in improving the sensitivity of integrated waveguide optical sensors and reducing the detection limit. We propose a polymer Mach–Zehnder interferometer (MZI) optical sensor based on the slot structure and adopted the suspended structure to improve optical field interaction with the analyte, hence boosting the sensor’s sensing accuracy. In this paper, the effects of the single waveguide width, slot width, and coupling structure of the slot waveguide on the performance of the sensor operating at a 1550 nm wavelength were analyzed. Under the premise of satisfying single-mode transmission, we designed an MZI with a branch spacing of 10 µm, arm length of 2045 µm, branch span of 700 µm, and slot region of 500 µm. The sensor’s average sensitivity was 972.1 dB/RIU, and its average detection resolution was 1.6 × 10−6 RIU, which is approximately 1.5 times higher than that of the suspended strip waveguide, 1.6 times higher than that of the non-suspended slot structure, and 2.1 times higher than that of the non-suspended strip waveguide.
Recently, polymer nanocomposites have attracted great interest due to their remarkable characteristics of high performance and enabling production of low-cost devices. This article explores the reflective index sensing application of the polymer nanocomposite IOC-133, which is a TiOx/polymer nanocomposite with a reflective index between 1.8 and 1.9. Considering the material properties of high reflective index, low absorption loss, and compatibility with nanoimprint lithography, a microring-based reflective index sensor with a suspended slot waveguide structure is proposed. We combined the sensing mechanism of slot waveguides with high reflective index polymer nanocomposites and designed the suspended structure to address the problem of decreasing sensitivity caused by residual layers. The sensing device was adopted as a microring resonator, which is conducive to large-scale integration. The finite-difference time-domain (FDTD) method was employed to analyze the effects of several key parameters. The results showed that the racetrack microring sensor we propose can achieve a high sensitivity of 436 nm/RIU (Refractive Index Units), about six times higher than the microring sensor with a ridge waveguide. The Q factor of the microring reaches 1.42 × 104, and the detection limit is 1.38 × 10−4 RIU. The proposed suspended slot microring sensor has potential value in the field of nanoprinted photonic integrated circuits.
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