Silicon nanoparticles with bright visible photoluminescence have been prepared by a new combined vapor phase and solution phase process, using only inexpensive commodity chemicals. CO2 laser induced pyrolysis of silane was used to produce Si nanoparticles at high rates (20−200 mg/h). Particles with an average diameter as small as 5 nm were prepared directly by this vapor phase (aerosol) synthesis. Etching these particles with mixtures of hydrofluoric acid (HF) and nitric acid (HNO3) reduced the size and passivated the surface of these particles such that after etching they exhibited bright visible luminescence at room temperature. The wavelength of maximum photoluminescence (PL) intensity was controlled from above 800 nm to below 500 nm by controlling the etching time and conditions. Particles with blue emission (maximum PL intensity at 420 nm) were prepared by rapid thermal oxidation of orange-emitting particles. The particle synthesis methods; steady-state photoluminescence spectra; results of their characterization using TEM, XRD, FTIR absorption spectroscopy, and XPS; and preliminary assessments of the stability of the photoluminescence properties with time are presented here. Preparation of macroscopic quantities by the methods described here opens the door to chemical studies of free silicon nanoparticles that could previously be carried out only on porous silicon wafers, as well as to potential commercial applications of silicon nanoparticles.

CO2 laser induced pyrolysis of silane was used to produce silicon nanoparticles with an average diameter as small as 5 nm at high rates (up to 200 mg/h). Etching these particles with a mixture of hydrofluoric acid (HF) and nitric acid (HNO3) reduces their size and passivates their surface such that they exhibit bright visible photoluminescence (PL). This paper describes the attachment of organic molecules to hydrogen-terminated and hydroxyl-terminated surfaces of these nanoparticles. Stable particle dispersions in various solvents were obtained by treatment of hydrogen-terminated surfaces with octadecene or undecylenic acid and by treatment of hydroxyl-terminated surfaces with octadecyltrimethoxysilane. Transmission electron microscopy showed that the surface-functionalized particles were well dispersed and crystalline. FTIR spectroscopy confirmed the expected reactions of the organic molecules with the particle surfaces. Photoluminescence measurements showed that surface treatment significantly stabilized the PL properties of the nanoparticles against degradation. Size selective precipitation was applied to particle dispersions and allowed some narrowing and tuning of the PL spectrum.

Thermal decomposition of silane can be used to produce silicon nanoparticles, which have attracted great interest in recent years because of their novel optical and electronic properties. However, these silicon nanoparticles are also an important source of particulate contamination leading to yield loss in conventional semiconductor processing. In both cases, a fundamental knowledge of the reaction kinetics of particle formation is needed to understand and control the nucleation of silicon particles. In this work, detailed kinetic modeling of silicon nanoparticle formation chemistry was carried out using automated reaction mechanism generation. Literature values, linear free-energy relationships (LFERs), and a group additivity approach were incorporated to specify the rate parameters and thermochemical properties of the species in the system. New criteria for terminating the mechanisms generated were also developed and compared, and their suitability for handling an unbounded system was evaluated. Four different reaction conditions were analyzed, and the models predicted that the critical particle sizes were Si 5 for an initial H 2 /SiH 4 molar ratio of 90:10 at 1023 K and Si 4 for the same initial composition at 1200 K. For an initial H 2 /SiH 4 molar ratio of 99:1, the critical particle size was larger than or equal to Si 7 for both temperatures, but it was not possible to determine the exact critical particle size because of limitations in computational resources. Finally, the reaction pathways leading to the formation of nanoparticles up to the critical size were analyzed, and the important species in the pathways were elucidated.

Nanoparticles of nickel have been prepared by laser-driven decomposition of nickel carbonyl. In this method, an infrared laser rapidly heats a dilute mixture of nickel carbonyl and a photosensitizer in a carrier gas to decompose the precursor and initiate particle nucleation. To produce nickel nanoparticles, nickel carbonyl was generated in situ from activated nickel powder and CO at room temperature, so that we never maintained any inventory of this highly toxic compound. During the synthesis process, laser heating allows for rapid cooling of the freshly nucleated particles by mixing with unheated gas. By varying the precursor flow rate, laser energy, and unheated gas flow rate to change the residence time, precursor concentration, and reaction temperature, the average particle size can be controlled over a range of primary particle diameters from 5 to 50 nm. The particle size and crystalline structure have been characterized using X-ray diffraction (XRD), transmission electron microscopy (TEM), nitrogen physisorption surface area measurement (the BET method), and X-ray photoelectron spectroscopy (XPS). Results of magnetization measurements for small superparamagnetic nickel nanoparticles (about 8-nm diameter) are also presented.