In this study, microelectromechanical systems (MEMS) force sensors based on H-free amorphous carbon (a-C) films with controlled piezoresistive behavior were fabricated by a facile magnetron sputtering technique. By adjusting the substrate bias voltage from 0 V (floating state) to-350 V, the gauge factor (GF) of the a-C film was modulated in the range of 1.4-12.1. Interestingly, the GF showed a strong dependence on the sp 2 content and the sp 2 cluster size of the film, which was consistent with the theory of thick film resistors. In addition, the sensitivity of a-C based MEMS force sensors reached 80.7 lV/V/N in the force range of 0-1.16 N, with a nonlinearity of approximately 1.3% full scale and good repeatability in over 5000 test cycles.
Usually, two-dimensional (2D) flexible strain sensors based on cracks have very high sensitivities but small measuring ranges, while the three-dimensional (3D) ones behave in the opposite way. Here, by utilizing the large residual compressive stress of an amorphous carbon (a-C) film and the flexibility of polydimethylsiloxane (PDMS), we developed a facile and economic strategy to fabricate a high-sensitive a-C/PDMS stretchable strain sensor. Results showed that for the first time, the a-C film ranging from 25 nm to 1 μm changed the shape and orientation of conductive scales, as well as made a one-step 2D-to-3D electrical junction transformation in integrated sensors. In particular, the sensor with a 1 μm thick a-C film exhibited the best comprehensive performance, displaying a maximum gauge factor of 746.7 and strain range up to 0.5. However, the linearity decreased slightly as the strain range went beyond 0.43. Additionally, the sensor showed a satisfactory repeatability for 5000 cycles, together with excellent time and temperature drift performances at zero position of 75 ppm full scale (FS) and 25 ppm FS•°C −1 in the range of −20 to 155 °C, respectively. The sensor has large potentials for wearable devices used in the monitoring of various human motions and physiological signals.
A 3Dprinted micropressure sensor with high sensitivity is developed in this paper. It is a fully printed pressure sensor fabricated using a combination of digital light processing (DLP) based printing and screenprinting technologies, with the advantages of high manufacturing efficiency and low cost. The pressure sensor consists of a sensor substrate with a circular diaphragm and a Wheatstone bridge on the surface. First, the pressure sensor was theoretically analyzed and then verified using the finite element method (FEM). During fabrication, the sensor substrate was made from a transparent hightemperature resin, which was printed by a DLPbased 3D printer. The resistors and leads of the Wheatstone bridge were made from carbon paste and silver paste, respectively, and printed by screenprinting technology. Then, the resistors were characterized to find the gauge factor and the print consistency between different resistors. Next, the experimental setup was established for the characterization of the pressure sensor. Three loops of pressurization and depressurization from 0 kPa to 2.4 kPa were applied to the pressure sensor continuously, and the output voltage was recorded. The experimental results show that the gauge factor of the carbon resistor is 17.01 ± 1.85, the sensitivity of the sensor is 4.5522 mV/kPa/5 V, the linearity error is 2.077% FS, the hysteresis error is 6.327% FS and the repeatability error is 5.708% FS. Also, it is very convenient to obtain pressure sensors with different sensitivities and measurement ranges by changing the thickness of the circular diaphragm. All these results prove that the proposed sensor provides a low cost and high sensitivity approach for micropressure measurement, and that 3D printing can be applied to the production of personalized sensors.
Single-phase inverters with an output LC filter, can generate low distortion output voltages, which are suitable for uninterruptible power supply (UPS) systems. The UPS system provides emergency power in the case of utility power failure, requiring high reliability and clean power. The sensorless control method is actually a soft-sensing technique, that reduces system cost, measurement-related losses, and, especially important for UPS systems, enhances the system reliability. This paper proposes a load current sensorless finite control set model predictive control (FCS-MPC) scheme for a single-phase UPS inverter. A time varying observer is proposed, which offers the accurate estimation for individual components simultaneously in periodic load current signal, without subsequent complex calculations. Compared with another two typical sensorless methods (the low-pass filter and the Kalman filter), the proposed observer-based FCS-MPC strategy has smaller load current estimation error and lower output voltage distortion, under both linear and nonlinear loads. The theoretical analysis is verified through simulation and experiment. A single-phase inverter rapid control prototype (RCP) is set up with the Speedgoat real-time target machine, to confirm the effectiveness of the system.
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