(Anti-)ferroelectricity in complementary metal-oxide-semiconductor (CMOS)-compatible binary oxides have attracted considerable research interest recently. Here, we show that by using substrate-induced strain, the orthorhombic phase and the desired ferroelectricity could be achieved in ZrO2 thin films. Our theoretical analyses suggest that the strain imposed on the ZrO2 (111) film by the TiN/MgO (001) substrate would energetically favor the tetragonal (t) and orthorhombic (o) phases over the monoclinic (m) phase of ZrO2, and the compressive strain along certain ⟨11-2⟩ directions may further stabilize the o-phase. Experimentally ZrO2 thin films are sputtered onto the MgO (001) substrates buffered by epitaxial TiN layers. ZrO2 thin films exhibit t- and o-phases, which are highly (111)-textured and strained, as evidenced by X-ray diffraction and transmission electron microscopy. Both polarization-electric field (P-E) loops and corresponding current responses to voltage stimulations measured with appropriate applied fields reveal the ferroelectric sub-loop behavior of the ZrO2 films at certain thicknesses, confirming that the ferroelectric o-phase has been developed in the strained (111)-textured ZrO2 films. However, further increasing the applied field leads to the disappearance of ferroelectric hysteresis, the possible reasons of which are discussed.
Ferroelectric hafnia-based thin films have attracted intense attention due to their compatibility with complementary metal-oxide-semiconductor technology. However, the ferroelectric orthorhombic phase is thermodynamically metastable. Various efforts have been made to stabilize the ferroelectric orthorhombic phase of hafnia-based films such as controlling the growth kinetics and mechanical confinement. Here, we demonstrate a key interface engineering strategy to stabilize and enhance the ferroelectric orthorhombic phase of the Hf0.5Zr0.5O2 thin film by deliberately controlling the termination of the bottom La0.67Sr0.33MnO3 layer. We find that the Hf0.5Zr0.5O2 films on the MnO2-terminated La0.67Sr0.33MnO3 have more ferroelectric orthorhombic phase than those on the LaSrO-terminated La0.67Sr0.33MnO3, while with no wake-up effect. Even though the Hf0.5Zr0.5O2 thickness is as thin as 1.5 nm, the clear ferroelectric orthorhombic (111) orientation is observed on the MnO2 termination. Our transmission electron microscopy characterization and theoretical modelling reveal that reconstruction at the Hf0.5Zr0.5O2/ La0.67Sr0.33MnO3 interface and hole doping of the Hf0.5Zr0.5O2 layer resulting from the MnO2 interface termination are responsible for the stabilization of the metastable ferroelectric phase of Hf0.5Zr0.5O2. We anticipate that these results will inspire further studies of interface-engineered hafnia-based systems.
Biologically inspired neuromorphic sensory memory systems based on memristor have received a lot of attention in the booming artificial intelligence industry due to significant potential to effectively process multi‐sensory signals from complex external environments. However, many memristors have significant switching parameters disperse, which is a great challenge for using memristors in bionic neuromorphic sensory memory systems. Herein, a stable ferroelectric memristor based on the Pd/BaTiO3:Eu2O3/La0.67Sr0.33MnO3 grown on Silicon structure with SrTiO3 as buffer layer is presented. The device possesses low coercive field voltage (−1.3–2.1 V) and robust endurance characteristic (~1010 cycles) through optimizing the growth temperature. More importantly, an ultra‐stable artificial multimodal sensory memory system with visual and tactile functions was reported for the first time by combining a pressure sensor, a photosensitive sensor, and a robotic arm. Utilizing the above system, the sensitivity value of the system is expressed by the conductance of the memristor to realize the gradual change of external stimulus, and multi signals inputs at the same time to this system have faithfully achieved sensory adaptation to multimodal sensors. This work paves the way for future development of memristor‐based perception systems in efficient multisensory neural robots.image
As Moore's Law approaches physical limits, traditional von Neumann buildings are facing challenges. The application of memristors in multilayer storage, neuromorphic systems and analog circuits has the potential to overcome the von Neumann architecture bottleneck. Here, we fabricated high-performance memristors based on the Pd/La: HfO 2 /La 2/3 Sr 1/3 MnO 3 device on silicon substrate, which facilitate the compatibility with complementary metal oxide semiconductor processes. The memristor devices exhibited good cycling stability and multilevel resistive state storage capabilities. And the synaptic properties of the device, such as long-term potentiation/depression, short-term memory to long-term memory, spike time-dependent plasticity, and double-pulse facilitation, were also shown. Based on the brainlike synaptic behavior of the device, a high recognition rate of 91.11% was achieved in recognizing face images in neuralinspired computing. Through theoretical calculation and hardware associative learning circuit test, the hafnium-based ferroelectric memristor was successfully applied to biological associative learning behavior for the first time.
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