Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of lead styphnate (LTNR) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, lead styphnate). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω, which is triggered by electrical power delivered to LTNR. The resistance of Ni-Cr bridges is used to sense the temperature on the LTNR which is in contact. The other one point is the optimization of silicon chamber process obtaining incorporate configuration of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested with ignition voltage less than 13V. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.
In order to protect porous silicon from break and enhance it’s porosity and specific surface area, porous silicon is prepared with electrochemical etching method. The charateristic of porous silicon is investigated with SEM and high-speed adsorption surface area and porosity analyzer. The results show that the porous silicon prepared with the method of gradient etching and control of etching time is mechanically stable. The porosity and specfic surface area are improved.
Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of the potassium salt of 7-hydroxy-4,6-dinitro-5,7-dihydrobenzofuroxanide (KDNBF) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, KDNBF). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω and Al bridges with about 350Ω, which are triggered by electrical power delivered to KDNBF. The resistance of Ni-Cr and Al bridges is used to sense the temperature on the KDNBF which are in contact. The other one point is firing testing of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested that including Ni-Cr bridges of the 50% sensitivity on voltage, current ignition is 10.83V,0.26A; including Al bridges of the 50% sensitivity on current ignition is 0.176A; the ignition of voltage is unstable. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.
Combustion of energetic materials is an attractive means of obtaining a large quantity of energy from a small volume. And these materials can be integrated into functional micro-systems in a manner compatible with micro-system technologies, then micro-pyrotechnics could help to make considerable progress in the field of micro-actuation . In this paper,a micro-pyrotechnical actuator was designed and fabricated. Detailed design and fabrication process of each part of actuator were presented, and the integration is described. Its operation was validated by experimentation. The firing performance is excellent for low-energy ignition requirement.
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