Simple equations are proposed for determining elastic modulus and hardness properties of thin films on substrates from nanoindentation experiments. An empirical formulation relates the modulus E and hardness H of the film/substrate bilayer to corresponding material properties of the constituent materials via a power-law relation. Geometrical dependence of E and H is wholly contained in the power-law exponents, expressed here as sigmoidal functions of indenter penetration relative to film thickness. The formulation may be inverted to enable deconvolution of film properties from data on the film/substrate bilayers. Berkovich nanoindentation data for dense oxide and nitride films on silicon substrates are used to validate the equations and to demonstrate the film property deconvolution. Additional data for less dense nitride films are used to illustrate the extent to which film properties may depend on the method of fabrication.
Suvorova, A.; Lawn, B. R.; Liu, Y.; Hu, X. Z.; Dell, J. M.; and Faraone, L., "Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films" (2006
AbstractThe effect of deposition conditions on characteristic mechanical properties -elastic modulus and hardness -of low-temperature PECVD silicon nitrides is investigated using nanoindentation. It is found that increase in substrate temperature, increase in plasma power and decrease in chamber gas pressure all result in increases in elastic modulus and hardness. Strong correlations between the mechanical properties and film density are demonstrated. The silicon nitride density in turn is shown to be related to the chemical composition of the films, particularly the silicon/nitrogen ratio.
Margin cracks in loaded brittle dome structures are investigated. Dome structures consisting of glass shells filled with polymer resin, simulating the essential features of brittle crowns on tooth dentin, provide model test specimens. Disk indenters of diminishing elastic modulus are used to apply axisymmetric loading to the apex of the domes. Previous studies using hard indenters have focused on fractures initiating in the near-contact region of such specimens, including radial cracks at the glass undersurface directly below the contact axis. Here, we focus on fractures initiating at the remote support margins. Margin cracks can become dominant when loading forces are distributed over broad contact areas, as in biting on soft matter, here simulated by balsa wood disks. Cracks preinitiated at the dome edges during the specimen preparation propagate under load around the dome side into segmented, semilunar configurations reminiscent of some all-ceramic crown failures. Finite element analysis is used to determine the basic stress states within the dome structures, and to confirm a shift in maximum tensile stress from the near-contact area to the dome sides with more compliant indenters.
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