This paper presents a feasibility step in the development of an ultra-small biomimetic flying machine. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. To achieve this goal, a flapping-wing flying MEMS concept and design inspired from insects is first described. Actuators and an actuation way for the control over the wing kinematics are proposed. The initial concepts are subsequently analyzed and presented using multi-body and finite element models. An overview of SU-8 photoresist structures and their functions in the future micro-robot insect is then presented. Consequently, micromachining enables the implementation of a flying MEMS. It is also demonstrated that the structure can be made at insect sizes and actuated at low power inputs. Moreover, the flapping frequency obtained is within the flapping frequency range of wings of many common insects of millimetric dimensions. Such prototypes are of interest as tools to artificially recreate and study insect flight with characteristics, similar to those of insects, that are able to produce lift and hover. Finally, if a micro-battery, wireless receivers, microcontrollers, sensors and actuators can all be fitted onto chips only a few millimeters square, with a mass in the order of milligrams, then we believe that an insect-size flying MEMS can be realized. All these requirements can now be achieved due to advanced engineering methods.
Insect wings consist of supporting veins and flexible membranes using fibrous composite material. This paper describes a method of wing design and fabrication based on composite, mimicking insect wings through advanced microelectromechanical system (MEMS) technology. SU-8 'fiber' reinforced polydimethylsiloxane (PDMS) membrane forms a fine structure, approaching real wings not only in material conception but also in mechanical performance. Based on a design in its initial stage, a new process was developed integrating all steps into a single procedure. We use a tailored AZ 4562 resist layer as the mold for PDMS wing membrane structuring. A 20 nm hydrophilic oxide layer was grown on the substrate to solve the final lift-off problems which become more severe when the wing membrane gets thinner. The vein thickness can be controlled with high precision by the spin-coating technique. The thickness of artificial membrane can be thinned down to a few microns, thus emulating those of some insects. Our process is compatible with common MEMS technology, and eligible to produce artificial wings of complex geometry and morphology mimicking natural insect wings. Our conclusion is that natural wings can be well mimicked in material conception, weight, venation, size, mass distribution and wing rigidity using hybrid materials. We also show that even using exceedingly compliant material as one composition, composite airfoils can be as light and stiff as insect wings, thereby highlighting the merit of smart material hybridization.
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