The use of nanostructured TiO2 layers fabricated on thin-film solar cells to provide, simultaneously, both antireflection functionality and light trapping via scattering of long-wavelength photons into guided optical modes is demonstrated and analyzed in thin-film quantum-well solar cells. Nanosphere lithography is used for fabrication of periodic arrays of subwavelength-scale TiO2 structures, and separation of active device layers from their epitaxial growth substrate and integration with the nanostructured TiO2 layer enables increased optical absorption via coupling to both Fabry-Perot resonances and guided lateral propagation modes in the semiconductor. The nanostructured TiO2 layer is shown to act as a graded-index coating at optical wavelengths and simultaneously to scatter incident light into guided optical modes within the device. The dependence of these effects on angle of incidence is also analyzed.
The dependence of light trapping effects in In0.3Ga0.7As/GaAs quantum-well solar cells on wavelength and incident angle is experimentally characterized and analyzed. Separation of active device layers from their epitaxial growth substrate enables integration of thin-film semiconductor device layers with nanostructured metal/dielectric rear contacts to increase optical absorption via coupling to both Fabry-Perot resonances and guided lateral propagation modes in the semiconductor. The roles of Fabry-Perot resonances and coupling to guided modes are analyzed via photocurrent response measurements and numerical modeling for light incident at angles of 0° (normal incidence) to 30° off normal. Light trapping enables external quantum efficiency at long wavelengths as high as 2.9% per quantum well to be achieved experimentally, substantially exceeding the ∼1% per quantum well level typically observed. Increased long wavelength quantum efficiency is shown in experimental measurements to persist with increasing angle of incidence and is explained as a consequence of the large number of guided modes available in the device structure.
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