The galvanometer scanning system plays a crucial role in modern laser material processing. With the development of this industry, the requirements for galvanometer scanners are getting higher and higher, especially to overcome the inherent disadvantages that still exist, such as image distortion, marking speed and accuracy in state-of-the-art scanning systems. In this paper, a single-axis optical scanner using two galvanometers in combination with one f-theta telecentric lens and a 343 nm femtosecond pulse laser source is proposed as a new approach for enhancing the precision of laser micromachining technology. The additional second galvanometer is used to manipulate the output laser beam of the first galvanometer to the path with less lens aberration to enhance the telecentricity correction and the effective scanning area. This is based on the international standard regulation ISO (the International Organization for Standardization) 11145:2018 requirements in optics and photonics, in which an important criterion is for the roundness of the focused beam spot to be greater than 87% to determine the effective working length of the proposed scanning system compared to the conventional scanning system. It is demonstrated by optical simulations and real optical experiments that the effective working length can be increased by 3.6 mm, corresponding to 8.1% of the effective scanning field, to achieve a laser material processing system with ISO standard. The damped least squares (DLS) algorithm in optical design software ZEMAX is used to optimize the deflected angle of the two galvanometers to obtain the optimal incident position of the f-theta lens.
Convex aspherical surfaces are being increasingly used as elements of the high-precision optical devices for various purposes. Complexity in such surfaces manufacture is because the existing methods of their shape control with the optical accuracy of about 20--30 nm require introduction of the auxiliary reference optical elements, which dimensions are several times larger than those of the controlled part are. The paper proposes the autocollimation control method using a concentric meniscus lens with dimensions slightly exceeding the dimensions of the controlled part. Results of calculating the control circuit design parameters are presented based on the theory of the third-order aberrations. Effect of the refractive index and thickness of a concentric meniscus lens on the maximum and root-mean-square deviations of the surface shape with various requirements to concentric meniscus lens radii was considered, and the developed scheme simulation in the Zemax soft-ware was also proposed. The Fizeau interferometer optical scheme was described using a lens with the reference surface to implement the developed method. Applied research was carried out to control the secondary mirrors of the Ritchie --- Chretien telescope at the Hoa Lak Observatory (Vietnam) and of the SNAP satellite telescope
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