Microswellings of 1 µm height, 1.5 µm diameter, and regular intervals of 2.5 µm on a silicone rubber surface were fabricated using a 193 nm ArF excimer laser. The laser was focused on silicone by each microsphere made of silica glass of 2.5 µm diameter; these microspheres covered the entire surface of the silicone. The surface underneath each microsphere selectively swelled owing to the photodissociation of the Si–O bonds of silicone. The contact angle of water was measured to be approximately 155°, indicating a clear superhydrophobicity. The samples successfully repelled water in water to form an air gap layer between silicone and water.

Periodic microswelling structures were photochemically induced on a silicone rubber surface using a 193 nm ArF excimer laser. Microspheres made of silica glass (SiO2) of 2.5 µm diameter were aligned on the silicone rubber surface during laser irradiation; the laser beam was focused on the silicone surface underneath each microsphere. The height and diameter of the formed microswelling structures were found to be controllable by changing the Ar gas flow rate, single-pulse laser fluence, and laser irradiation time. The chemical bonding of the laser-irradiated sample did not change and thus remained to be a silicone, as analyzed by X-ray photoelectron spectroscopy. As a result, microswelling structures of approximately 1.3 µm height and 1.3 µm diameter were successfully obtained. The contact angles of water on the microstructured silicone were measured to be 150° and larger, clearly indicating superhydrophobicity. The mechanism by which the microswellings form their shape was discussed on the basis of the changes in the focal point and spot size during laser irradiation through the SiO2 microsphere.