One of the most popular applications of a bi-axial motion stage is precision motion control. The reduction of tracking error and contour error is one of the most coveted goals in precision motion control systems. The accuracy of a motion control system is often affected by external disturbances. In addition, system non-linearity such as friction also represents a major hurdle to motion precision. In order to deal with the aforementioned problem, this paper proposes a fuzzy logic-based Reinforcement Iterative Learning Control (RILC) and a Cross-Coupled Cerebellar Model Articulation Controller (CCCMAC). In particular, the proposed fuzzy logicbased RILC and a LuGre friction model-based compensation approach are exploited to improve motion accuracy. The fuzzy logic-based RILC aims at reducing tracking error and compensating for external disturbance, while the LuGre friction model is responsible for friction compensation. In addition, the CCCMAC consisting of a cerebellar model articulation controller and a cross-coupled controller aims at reducing contour error and dealing with the problem of dynamics mismatch between different axes. Performance comparisons between the proposed fuzzy logic-based Reinforcement Iterative Learning Cross-Coupled Cerebellar Model Articulation Controller (RIL-CCCMAC) and several existing control schemes are conducted on a bi-axial motion stage. Experimental results verify the effectiveness of the proposed RIL-CCCMAC.
-Contour following motions are commonly seen in industrial manufacturing, in which the quality of manufacturing/product closely depends on the accuracy of contour following motions. In general, contour following accuracy will be affected by factors such as dynamics incompatibility among different axes and external disturbances. In order to cope with this problem, this paper proposes a new motion control scheme that consists of a well-known cross-coupled controller (CCC) and an adaptive disturbance compensator (ADC). In particular, the proposed motion control scheme is mainly used to suppress external disturbance and also cope with the problems of modeling uncertainty and dynamics incompatibility among different axes. Moreover, in order to further enhance the effectiveness of the proposed motion control scheme, the parameter-based contour error estimation algorithm is employed in this paper to provide accurate contour error information to the cross-coupled controller. Several contour following experiments conducted on a two-axis motion stage are used to assess the effectiveness of the proposed control scheme.
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