Due to unique optical and electrical properties, micro-/nano-structures have become an essential part of optoelectronic devices. Here, we summarize the recent developments in micro-/nano-structures fabricated by laser technologies for optoelectronic devices. The fabrication of micro-/nano-structures by various laser technologies is reviewed. Micro-/nano-structures in optoelectronic devices for performance improvement are reviewed. In addition, typical optoelectronic devices with micro-nano structures are also summarized. Finally, the challenges and prospects are discussed.
Switchable and reversible optical elements have potential applications in self-adaptive optics. Shape-memory polymer devices with adaptive properties could be easily switched under environment or field stimuli. Here, the laser beam interference technique was used to realize the periodic grating structures of the shape-memory polymer, and memory and recovery of the grating structures were performed. A one-dimensional grating structure was fabricated from dual-beam interference lithography of a nanosecond laser and underwent pressure in a condition of 195°C. The vertical height of the grating was reduced, and the diffraction light was weakened. When the sample was cooled down to room temperature, the morphology of the grating could be kept. After raising the ambient temperature of the sample to 120°C, the morphology of the grating was recovered to the original state, which realized the shape-memory function.
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