Our research team has developed a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high-image resolution and field of view obtained by mirror-based display systems. The basic design of the optical scanner includes a microfabricated SU-8 cantilever waveguide that is electromechanically deflected by a piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the actuator and the LED light modulation are generated and controlled using a field programmable gate array. Our recent study is an update to the previously-reported mechanical scanner, replacing the hand-built PZT scanner and fiber waveguide with a microfabricated system incorporating aerosol-deposited PZT thin film and a polymeric SU-8 wave guide. In this article, we report on the design and fabrication of a prototype miniaturized 2D scanner, discuss optical and mechanical the modeling of the system’s properties and present the experimental results.
To deliver state-of-the-art battery knowledge to undergraduates, we designed a feasible experiment to prepare flexible packaging batteries, aiming to reproduce industrial flexible packaging batteries in general chemistry laboratories. In our procedure, the materials involved are inexpensive, safe, and easy to use. No organic solvents or toxic chemicals are required, nor is a severe drying laboratory or a glovebox. The fabricated batteries have a similar structure to commercial batteries and are evaluated by a charge–discharge technique. This experimental design offers new routes to familiarize students with the construction and mechanism of lithium ion batteries.
Hermeticity of MEMS wafer packaging has a major impact on the performance and reliability of MEMS devices. The test for hermeticity is usually based on the test method from MIL-STD-883. However, both theory and experiment have shown that this test standard has great limitations for MEMS wafer cavities. Raman spectroscopy has also been used to obtain the quantitative and qualitative information about the molecular composition in the small cavity of MEMS packages and then determine the leak rate of MEMS packages. However, this method is reliant on the package cap being transparent to the probing light and requires a reflective surface. In this paper, the Raman spectroscopy is used to obtain the stress of the surface of the package cap and from the information of stress change to infer the change of the gas pressure in the vacuum encapsulation cavity. The results have shown that the lower the gas pressure in the cavity, the larger the tensile stress; When packaged in the atmosphere, the sample cap has shown a compressive stress (corresponding to the reference), which may result from fabrication process. Based on this method, there is no need to use a transparent package cap, and there is no special requirement for the roughness of the cap surface. Compared with the optical deformation test, this method can directly obtain the surface stress information of the cover without knowing the relevant geometric parameters of the MEMS structure.
Here we present a new microfabricated optical endoscope using a fully integrated optical waveguide with a push-pull piezoelectric actuator design. This new scanning probe was constructed using SU-8 epoxy-based photoresist as a resonant cantilever. The scanner was driven with a frequency of 25 Hz in the horizontal direction and a frequency of 4.71 kHz in the vertical direction. The best resolution obtained by the scanner is ~ 4 μm. A specific application for the design is in the area of endoscopy, where there is a need for a minimally invasive device that reduces the discomfort experienced by the patient by reduces the overall geometry of the endoscope.
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