No abstract

Diffractive optical elements (DOEs) are key components in the miniaturization of optical systems because of their planarity and extreme thinness. We demonstrate the fabrication of DOEs by use of gray-scale photolithography with a high-energy-beam sensitive glass photomask. We obtained DOE lenses with continuous phase profiles as small as 800 microm in diameter and 5.9 microm in the outermost grating pitch by selecting a suitable optical density for each height level and optimizing the process variables. Microlenses patterned with eight levels and replicated by UV embossing with the polymer master mold showed a diffraction efficiency of 81.5%, which was sufficiently high for the devices to be used as optical pickups. The effects of deviations in diffraction efficiency between the DOE height and profile design were analyzed.

This paper analyzes the effects due to the angular motion of a small-sized imaging system equipped with an optical image stabilizer (OIS) on image quality. Accurate lens moving distances for the OIS required to compensate the ray distortion induced by the angular motion are determined. To calculate the associated modulation transfer function, the integrated and the compensated point spread functions are defined. Finally, the deterioration of the image resolution due to angular motion and the restorative performance of the OIS are analyzed by isolating seven types of angular motion.

We analyzed the behavior of the electric field in a focal plane consisting of a solid immersion lens (SIL), an air gap, and a measurement sample for radially polarized illumination in SIL-based near-field optics with an annular aperture. The analysis was based on the Debye diffraction integral and multiple beam interference. For SIL-based near-field optics whose NA is higher than unity, radially polarized light generates a smaller beam spot on the bottom surface of a SIL than circularly polarized light; however, the beam spot on the measurement sample is broadened with a more dominant transverse electric field. By introducing an annular aperture technique, it is possible to decrease the effects of the transverse electric field, and therefore the size of the beam spot on the measurement sample can be small. This analysis could have various applications in near-field optical storage, near-field microscopy, lithography at ultrahigh resolution, and other applications that use SILs for high resolution.

We introduce the design method of a hybrid lens composed a refractive lens and a diffractive optical element (DOE) considering the diffraction effect for a compact camera module. When imaging optical system is designed using the DOE, diffraction efficiency of the DOE and stray light due to the unintended diffraction light should be considered. Therefore, to analyze the effect of diffraction efficiency of the DOE on image characteristics, we evaluate the performances of two designed compact camera lenses, which have different construction wavelengths, using the modulation transfer function (MTF) considering diffraction efficiency. The stray light that is induced by the diffraction effect of the DOE is analyzed by calculating the focal position according to each diffraction order, and a method for the reduction of the stray light is proposed.