By applying glow discharge in a gaseous mixture composed of TiCI4-H2-N 2 it is possible to produce TiN layers or -if the process is conducted in two stages differing in the atmospheres used -composite layers, e.g. a nitrided layer covered by a titanium nitride layer. Electric activation of the gaseous medium and of the surface under treatment make it possible to reduce the treatment temperature down to 550 ~ This paper presents a description of the installation for producing composite layers, made of a nitrided sublayer, and a surface TiN layer on steels, as well as the results of structural examinations, wear and corrosion tests performed on the layers and qualitative analysis of TiCI4-H2-N2 plasma.
Low pressure plasma, its characteristics, excitation sources and applications are shortly presented. The paper is focused on three areas of low pressure plasma spectroscopy, i.e. spectrochemical analysis, investigation of technology processes and fundamental reference data. Matrix effects occurring in spectrochemical analyses by means of hollow cathode discharges are presented. Investigation and monitoring of processes of production of new materials in glow discharges are shown. Applicability of low pressure plasma for the determination of atomic (transition probabilities) and molecular reference data (electronic, vibrational and rotational constants) and utilization of molecular data are discussed.
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