A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is
This paper presents the preliminary design and experimental results of a standard AA size vibration-induced micro energy transducer which is integrated with a -power-management circuit. The transducer is a spring mass system which uses SU-8 molding and MEMS electroplating technologies fabricated copper springs to convert mechanical energy into electrical power by Faraday's Law of Induction. We have shown that when the MPG is packaged into an AA battery size container along with a power-management circuit that consists of rectifiers and a capacitor, it is capable of producing -1.6V DC when charged for less than Imin. Potential applications for this micro power generator to serve as a power supply for a wireless temperature sensing system was proved to be possible with input frequencies at about IOOHz and amplitudes be approximately 250microns.
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