Reliable low-cost positioning for precision manufacturing processes requiring clean-room, extreme-temperature or vacuum environments is key for microelectronics manufacturing, packaging, machine tool and high-precision inspection industries. The integrated multidimensional positioner presented herein is a major technological breakthrough and may o er competitive advantages in both cost and performance relative to current practices. Speci®cally, this integrated positioner can generate all required ®ne and coarse motions with only one levitated moving part, namely the platen, and have potential to satisfy the dynamic performance speci®cations necessary for next-generation deepsubmicron microelectronics manufacturing equipment. Absence of particulate contamination without mechanical contact between the single moving part and the machine frame makes this technology highly suited to clean-room operation. In this paper, the design concept, electromechanical design and fabrication and assembly of all the key parts in the development of this multidimensional positioner are presented. A dynamic model and feedback controllers were derived and implemented. This
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