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A novel photodiode for the blue/uv spectral range, which is compatible to standard bulk CMOS or BiCMOS technology processes, is presented. The new diode structure is compared to an equivalent diode smture, processed with conventional contact fmgegers. Quantum efficiencies of 62 % and 93.3 % were measured for blue (405 nm) and red (638.3 nm) laser light, respectively. A -3 dB bandwidth of over 259 M H z is determined for both wavelengths. The low dark cment density of 1.2 nA/cm' results in a very good noise performance.

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