A process is described for the formation of silicon oxide thin films by the low‐temperature decomposition of tetraethoxysilane in an a‐c glow discharge. The effects of various process parameters on the film deposition rate and the resultant film characteristics have been studied and are described. It has been shown that thin silicon oxide films prepared by glow discharge techniques can be used effectively as the dielectric in thin film capacitors. The resultant capacitors have low dielectric losses and are very stable under various life test conditions.
J a n u a r y 1964 stainless steel rod ~,..~metol rod ~r e t o i n i n g nut T y~m e t o l washer ~t h r e a d ~ j teflon II!1 II ',l ~. r . .~ teflon .~ y.z/~7]'~_,~ teflon sompte ~t e f l o ~teflon with metal . . . . Fig. 1. Electrode assembly a t t a c h i n g a Teflon w a s h e r to the b o t t o m b y m e a n s of t h r e a d s . A n a d v a n c e d a s s e m b l y , w h i c h is d e s c r i b e d in Fig. 1, c o m b i n e s the a d v a n t a g e s of the design of S t e r n and M a k r i d e s w i t h a m e t h o d of p r e p a r i n g t h e specim e n w h i c h can be a p p l i e d to a/most all m e t a l s and alloys. A t u b u l a r s a m p l e is p r e s s e d b e t w e e n Teflon w a s h e r s in such a w a y t h a t only the c y l i n d r i c a l p l a n e is e x p o s e d to the solution. A m e t a l rod w i t h t h r e a d s on both ends and w i t h good fit goes t h r o u g h the e l e c t r o d e and connects the l o w e r Teflon w a s h e r and the r e t a i n i n g nut at the u p p e r p a r t of the glass tube. The l o w e r Teflon w a s h e r c a r r i e s a m e t a l core w i t h threads. In t i g h t e n i n g the r e t a i n i n g nut sufficient and continuous p r e s s u r e is e x e r t e d to avoid c r e e p a g e of e l e c t r o l y t e b e t w e e n Teflon w a s h e r s a n d the metal. W h i l e p r e s s e d b e t w e e n the w a s h e r s the s a m p l e is t i l t e d a little bit and m a k e s good contact w i t h the rod. The m e a s u r e d contact r e s i s t a n c e is in t h e m a g n i t u d e of milliohm. This e l e c t r o d e is p l a c e d in the c e n t e r of a p l a t i n u m g r i d e l e c t r o d e s e r v i n g as c o u n t e r e l e c t r o d e . By e n l a r g i n g the d i a m e t e r of the two Teflon w a s h e r s it is possible to get a u n i f o r m c u r r e n t d e n s i t y d i s t r i b u t i o n even in cases w h e r e a v e r y low d i f f e r e n t i a l p o l a r i z a t i o n r e s i s t a n c e of t h e e l e c t r o d e exists. This a s s e m b l y has some m o r e a dv a n t a g e s : (a) The c o n t a c t -m a k i n g rod is often s o l d e r e d to t h e sample. This h e a t -t r e a t m e n t is a v o i d e d b y this a s s e m b l y and also b y the one S t e r n and M a k r i d e s proposed. (b) The s u r f a c e of the s a mple is easily p r e p a r e d b y p u t t i n g the e l e c t r o d e on a 8~rnm i 2~m/m 12 ~ rnm ,/ I 120 Fig. 2. Bottom casting mold for casting tubes s l i g h t l y conical pin of a s m a l l lathe and a b r a d i n g it w i t h e m e r y p a p e r or polishing it b y other m e a n s w h i l e rotating. (c) This a s s e m b l y can be a p p l i e d to s a m p l e s of almost all m a t e r i a l s . T h e r e is no s o l d e ring. M a c h i n i n g and t h r e a d i n g can b e c i r c u m v e n t e d as is s h o w n in the n e x t section. T h e t u b u l a r s a m p l e s can be m a d e of (a) ductile m a t e r i a l b y m a c h i n i n g on a lathe, (b) h a r d m e t a l or alloy b y m a c h i n e g r i n d i n g...
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.