We have chosen five complex molecules (C3F6O, C4F8O, C5F10O, C6F12O and C4F7N) for the present investigation, which are considered as potential substitutes for SF6 in plasma applications. There are some theoretical data available for ionization cross sections with contradicting values, especially at the peak. To the best of our knowledge, no experimental data are found in the literature to validate previous calculations. In this work, we have efficiently included nuclear charge distribution and the corresponding electrostatic potential in the spherical complex optical potential formalism for the first time. Thus, the nuclear static effect is included in the calculation of inelastic cross section of these plasma relevant molecules by electron scattering. A complex scattering potential-ionization contribution method is used to derive the ionization cross section. We have done a test run of the adopted changes on targets for which experimental measurements are available. Excellent agreement can be found for the entire energy range. For present plasma relevant molecules, a notable difference is seen in the lower energy region of investigation, which is a major improvement in our calculation. However, beyond the peak, the values are consistent with previous methods. For C6F12O this is the first report of ionization cross section.
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