This article describes a model that simulates etching profiles in reactive ion etching. In particular, models are developed to explain the significant lateral etch rate that is observed in many etch profiles. The total etch rate is considered to consist of two superimposed components: an ion-assisted rate and a purely ‘‘chemical’’ etch rate, the latter rate being due to etching by radicals in the absence of ion bombardment. The transport of radicals to the evolving interface is studied for two different transport mechanisms: re-emission from the surface and diffusion along the surface. For the case of transport by surface re-emission, a reactive sticking coefficient is defined for the radicals, and a formulation is developed to simulate etching for any value (between zero and unity) that this sticking coefficient may assume. When the sticking coefficient approaches either zero or unity, the method of characteristics is shown to be useful for profile simulation. Transport of radicals by surface diffusion is also investigated, and it is shown that the important dimensionless parameter governing profile evolution is the Damkohler number. The two models are compared to experiments performed on the etching of silicon in a SF6 plasma, and the surface re-emission model is shown to accurately predict the development of etching profiles.
We review the different spectroscopic techniques including the most recent laser-induced breakdown spectroscopy (LIBS) for the characterization of materials in any phase (solid, liquid or gas) including biological materials. A brief history of the laser and its application in bioscience is presented. The development of LIBS, its working principle and its instrumentation (different parts of the experimental set up) are briefly summarized. The generation of laser-induced plasma and detection of light emitted from this plasma are also discussed. The merit and demerits of LIBS are discussed in comparison with other conventional analytical techniques. The work done using the laser in the biomedical field is also summarized. The analysis of different tissues, mineral analysis in different organs of the human body, characterization of different types of stone formed in the human body, analysis of biological aerosols using the LIBS technique are also summarized. The unique abilities of LIBS including detection of molecular species and calibration-free LIBS are compared with those of other conventional techniques including atomic absorption spectroscopy, inductively coupled plasma atomic emission spectroscopy and mass spectroscopy, and X-ray fluorescence.
The minimization of nanoscale roughness in patterned images has become a priority for the process of photolithography in the production of microprocessors. In order to probe the molecular basis for surface roughness, the development of photoresist has been simulated through application of the critical-ionization model to a three-dimensional molecular lattice representation of the polymer matrix. The model was adapted to describe chemically amplified photoresists of the sort now commonly used in microlithography. Simulations of the dependence of the dissolution rate and surface roughness on the degree of polymerization, polydispersity, and fractional deprotection agree with experimental results. Changes in surface roughness are shown to correlate with the length of the experimentally observed induction period. Model predictions for the effect of void fraction and developer concentration on roughness are also presented. Observations of differences in the effect of developer concentration on top-surface and sidewall roughness are explained by a critical development time predicted by the simulation.
Kidney stone disease is a polygenic and multifactorial disorder with a worldwide distribution, and its incidence and prevalence are increasing. Although significant progress has been made in recent years towards identifying the specific factors that contribute to the formation of kidney stone, many questions on the pathogenesis of kidney stones remain partially or completely unanswered. However, none of the proposed mechanisms specifically consider the role(s) of the trace elements and, consequently, the contribution of trace constituents to the pathogenesis of kidney stones remains unclear and under debate. The findings of some studies seem to support a role for some major and trace elements in the initiation of stone crystallization, including as a nucleus or nidus for the formation of the stone or simply as a contaminant of the stone structure. Thus, the analysis of kidney stones is an important component of investigations on nephrolithiasis in order to understand the role of trace constituents in the formation of kidney stones and to formulate future strategies for the treatment and prevention of stone formation and its recurrence. The aim of this review is to compare and evaluate the methods/procedures commonly used in the analysis of urinary calculi. We also highlight the role of major and trace elements in the pathogenesis of kidney stones.
The utility of laser-induced breakdown spectroscopy (LIBS) for categorizing different types of gallbladder stone has been demonstrated by analyzing their major and minor constituents. LIBS spectra of three types of gallstone have been recorded in the 200-900 nm spectral region. Calcium is found to be the major element in all types of gallbladder stone. The spectrophotometric method has been used to classify the stones. A calibration-free LIBS method has been used for the quantitative analysis of metal elements, and the results have been compared with those obtained from inductively coupled plasma atomic emission spectroscopy (ICP-AES) measurements. The single-shot LIBS spectra from different points on the cross section (in steps of 0.5 mm from one end to the other) of gallstones have also been recorded to study the variation of constituents from the center to the surface. The presence of different metal elements and their possible role in gallstone formation is discussed.
The perpetual advancement of materials and equipment for microlithography has resulted in the ability to print critical dimensions that approach the size of the molecules that make up photoresists. As a result, molecular scale effects such as line edge roughness have become a concern for both resist manufacturers and process engineers. In this work we have investigated the increasing importance of molecular level effects, especially in terms of the contributions of the exposure and postexposure bake (PEB) steps to spatial variations in film composition. A mesoscale simulation of the PEB was used to model the discrete mass transport and reaction events that create the changes in film composition responsible for resist function. Local irregularities in resist composition are generated during the PEB, the magnitude of which can be related to the local concentration of acid. This study is focused on the establishment of an understanding of the effects of process and composition variables on the reaction product distribution. The reaction product distribution was calculated for an APEX®-like resist under a variety of exposure and bake conditions. These process variables have a profound influence on spatial irregularities in the composition gradient. Ultimately, it is the interaction of this reaction product distribution with the development process that will determine line edge roughness.
Moderate to severe pain occurs in many cancer patients during their clinical course and may stem from the primary pathology, metastasis, or as treatment side effects. Uncontrolled pain using conservative medical therapy can often lead to patient distress, loss of productivity, shorter life expectancy, longer hospital stays, and increase in healthcare utilization. Various publications shed light on strategies for conservative medical management for cancer pain and a few international publications have reviewed limited interventional data. Our multi-institutional working group was assembled to review and highlight the body of evidence that exists for opioid utilization for cancer pain, adjunct medication such as ketamine and methadone and interventional therapies. We discuss neurolysis via injections, neuromodulation including targeted drug delivery and spinal cord stimulation, vertebral tumor ablation and augmentation, radiotherapy and surgical techniques. In the United States, there is a significant variance in the interventional treatment of cancer pain based on fellowship training. As a first of its kind, this best practices and interventional guideline will offer evidenced-based recommendations for reducing pain and suffering associated with malignancy.
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