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Sb-doped ZnO (SZO) films were deposited on c-plane sapphire substrates by dual ion beam sputtering deposition system and subsequently annealed in-situ in vacuum and in various proportions of O2/(O2 + N2)% from 0% (N2) to 100% (O2). Hall measurements established all SZO films were p-type, as was also confirmed by typical diode-like rectifying current-voltage characteristics from p-ZnO/n-ZnO homojunction. SZO films annealed in O2 ambient exhibited higher hole concentration as compared with films annealed in vacuum or N2 ambient. X-ray photoelectron spectroscopic analysis confirmed that Sb5+ states were more preferable in comparison to Sb3+ states for acceptor-like SbZn-2VZn complex formation in SZO films.

The use of the high free-electron concentration in heavily doped semiconductor enables the realization of plasmons. We report a novel approach to generate plasmons in Ga:ZnO (GZO) thin films in the wide spectral range of ∼1.87-10.04 eV. In the grown GZO thin films, dual-ion beam sputtering (DIBS) instigated plasmon is observed because of the formation of different metallic nanoclusters are reported. Moreover, formation of the nanoclusters and generation of plasmons are verified by field emission scanning electron microscope, electron energy loss spectra obtained by ultraviolet photoelectron spectroscopy, and spectroscopic ellipsometry analysis. Moreover, the calculation of valence bulk, valence surface, and particle plasmon resonance energies are performed, and indexing of each plasmon peaks with corresponding plasmon energy peak of the different nanoclusters is carried out. Further, the use of DIBS-instigated plasmon-enhanced GZO can be a novel mean to improve the performance of photovoltaic, photodetector, and sensing devices.

Undoped ZnO thin films were grown on p-type Si (1 0 0) substrates at different oxygen partial pressure by dual ion beam sputtering deposition system at a constant growth temperature of 400 • C. The crystallinity, surface morphology, optical, elemental and electrical properties of these ZnO thin films was studied. The minimum value of full-width at half-maximum of the θ -rocking curve obtained from x-ray diffraction of the ZnO (0 0 2) plane, was reported to be 0.1865 • from ZnO film grown at 50% of (O 2 /(O 2 + Ar))%. Crystalline property of ZnO films was observed to degrade with the increase in oxygen partial pressure. Photoluminescence measurements demonstrated sharp near-band-edge emission at ∼381 nm at room temperature. X-ray photoelectron spectroscopy study revealed presence of oxygen interstitials and vacancies as point defects in ZnO films. Electrical resistivity of ZnO was found to increase with the increase in oxygen partial pressure.