This paper reports the design, fabrication and testing of microelectromechanical inductors (MEMIs) that show high electrical inductance by storing energy via a mechanically compliant flexure. The microfabricated MEMI structures comprise a simple electroplated Cu beam that is placed in a static magnetic field. Upon application of ac current, the conductor vibrates via electrodynamic interactions with the magnetic field. This electromechanical behavior manifests as a highly reactive (inductive) one-port electrical impedance. In this work, we explain the microfabrication processes and the subsequent characterization of a variety of test structures, which exhibit a peak quality factor up to 5.6 with net areal inductance densities of up to 3.5 µH/mm 2. These devices are envisioned as a passive energy storage component for exploring high-power-density electrical power converters.
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