The angular distribution of the sputtered Tb, Fe, and Co atoms from the elemental targets could be described by cosn θ distribution with n=1.90, 0.54, and 1.01 for Tb, Fe, and Co, respectively. For TbFeCo composite targets with mixed elemental and intermetallic compound phases, the overall angular distribution of the sputtered Tb, Fe, and Co atoms from the mixed phases could also be described by the cosn θ distribution function, and the values of the n’s were related to the volume percentage of the intermetallic compound content in the composite target. This was not true of the Tb distribution for a target containing high intermetallic compound content. In that sample, an off-normal term has to be added to the cosn θ distribution function. It was found that a composite target with about 23 vol % intermetallic compound would produce a uniform composition distribution of TbFeCo film on the substrate.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.