Phase Change Materials (PCMs) are unique compounds employed in non-volatile random access memory thanks to the rapid and reversible transformation between the amorphous and crystalline state that display large differences in electrical and optical properties. In addition to the amorphous-to-crystalline transition, experimental results on polycrystalline GeSbTe alloys (GST) films evidenced a Metal-Insulator Transition (MIT) attributed to disorder in the crystalline phase. Here we report on a fundamental advance in the fabrication of GST with out-of-plane stacking of ordered vacancy layers by means of three distinct methods: Molecular Beam Epitaxy, thermal annealing and application of femtosecond laser pulses. We assess the degree of vacancy ordering and explicitly correlate it with the MIT. We further tune the ordering in a controlled fashion attaining a large range of resistivity. Employing ordered GST might allow the realization of cells with larger programming windows.

Sb2Te3 films are used for studying the epitaxial registry between two-dimensionally bonded (2D) materials and three-dimensional bonded (3D) substrates. In contrast to the growth of 3D materials, it is found that the formation of coincidence lattices between Sb2Te3 and Si(111) depends on the geometry and dangling bonds of the reconstructed substrate surface. Furthermore, we show that the epitaxial registry can be influenced by controlling the Si(111) surface reconstruction and confirm the results for ultrathin films.

Neuromorphic computing architectures enable the dense co-location of memory and processing elements within a single circuit. This co-location removes the communication bottleneck of transferring data between separate memory and computing units as in standard von Neuman architectures for data-critical applications including machine learning. The essential building blocks of neuromorphic systems are non-volatile synaptic elements such as memristors. Key memristor properties include a suitable non-volatile resistance range, continuous linear resistance modulation and symmetric switching. In this work, we demonstrate voltage-controlled, symmetric and analog potentiation and depression of a ferroelectric Hf 0.57 Zr 0.43 O 2 (HZO) field effect transistor (FeFET) with good linearity. Our FeFET operates with a low writing energy (fJ) and fast programming time (40 ns). Retention measurements have been done over 4-bits depth with low noise (1 %) in the tungsten oxide (WO x ) read out channel. By adjusting the channel thickness from 15nm to 8nm, the on/off ratio of the FeFET can be engineered from 1 % to 200 % with an on-resistance ideally >100 kΩ, depending on the channel geometry. The device concept is using earth-abundant materials, and is 1 arXiv:2001.06475v1 [cs.ET] 17 Jan 2020 compatible with a back end of line (BEOL) integration into complementary metal-oxidesemiconductor (CMOS) processes. It has therefore a great potential for the fabrication of high density, large-scale integrated arrays of artificial analog synapses.Keywords ferroelectric switching, hafnium zirconium oxide, tungsten oxide, BEOL, ferroelectric field-effect transistor, memristor

The technological success of phase-change materials in the field of data storage and functional systems stems from their distinctive electronic and structural peculiarities on the nanoscale. Recently, superlattice structures have been demonstrated to dramatically improve the optical and electrical performances of these chalcogenide based phase-change materials. In this perspective, unravelling the atomistic structure that originates the improvements in switching time and switching energy is paramount in order to design nanoscale structures with even enhanced functional properties. This study reveals a high-resolution atomistic insight of the [GeTe/Sb 2 Te 3 ] interfacial structure by means of Extended X-Ray Absorption Fine Structure spectroscopy and Transmission Electron Microscopy. Based on our results we propose a consistent novel structure for this kind of chalcogenide superlattices.The need for fast and efficient management of information stimulates research on materials that can be switched on nanometer length scales and sub-nanosecond time scales. Phase-Change materials (PCMs) possess a unique property portfolio, which is ideally suited for memory device applications [1][2][3][4][5][6] . A PCM is identified by its ability of switching rapidly and reversibly between a crystalline and an amorphous state, where the amorphous state is obtained by melting the crystalline state followed by rapid quenching. These two states significantly differ in their properties, such as the optical reflectivity as well as the electrical conductivity. The phase transformation is in general triggered by thermal heating, or by either electrical and optical pulses of different time duration and amplitude. The large contrast in reflectivity between these two states lays at the base of already working PCM-based optical rewritable media devices-like DVDs or Blu-Ray Disc-where information is encoded as amorphous marks in a crystalline background. The contrast in resistivity could be exploited in the next generation of electronic solid-state memories based on PCMs, which might replace the current leading storage technologies, namely FLASH and magnetic disks. Furthermore, these materials could be employed in displays or data visualization applications by combining both their optical and electronic property modulations 7 . Hence, a lot of interest and effort is currently devoted to uncover the complex physical origin of the high contrast between the two phases [8][9][10]

In the present work, GeTe and Sb 2 Te 3 van der Waals bonded superlattices epitaxially grown by molecular beam epitaxy are investigated. These structures are grown on passivated Si substrates, resulting in one single epitaxial domain and its twinned domain, both sharing the same out-of-plane orientation. Supported by X-ray diffraction and Raman spectroscopy, attention is called to the thermodynamically driven tendency of GeTe and Sb 2 Te 3 to intermix into a Ge− Sb−Te (GST) alloy at the interfaces. A growth model is proposed to explain how these GST structures are formed.