The analysis and optimization of optical devices manufacturing technologies based on carbon nanotubes intended for work in the visible range were carried out. These processes studied in the work have practical application for the deposition of carbon nanotubes and their subsequent use as materials for prototypes of the waveguide and sensor of the visible range. To obtain a layer of carbon nanotubes, a chemical vapor deposition chamber was used. A dense horizontal network of CNTs was grown on silicon wafer by utilizing sandwich type catalyst structure. The growth was carried out with two variable parameters: flow rate and flow duration. Various aspects of the CNTs synthesis, mechanism of CNTs growth and power dependent laser sensing are considered in this article. The remarkable properties of as developed photo detector are its fast response and recovery time with 8% sensitivity.
Microcells were designed for subsequent modeling of piezoelectric and optical elements on their basis. The development of piezoelectric and optical elements from microcells was carried out and models were prepared for 3D printing. These designs can be used in practice as piezoacoustic or piezoelectric sensors if piezoelectric powder is added to their composition, for example, in ultrasonic flow meters, or used to create optical structures, for example, diffractive optical elements. The key characteristics and coefficients of piezoelectric structures, such as dielectric constant, conversion coefficient, dielectric loss coefficient, mechanical Q-factor, frequency constant, electromechanical coupling coefficient, piezoelectric charge coefficient, piezoelectric stress coefficient, elastic compliance coefficient, degradation rate, Curie point are analyzed. Elements produced by 3D printing will have properties different from those of elements produced by standard methods. These structures open up new opportunities for the development of ultrasonic research, mechanical engineering and instrument making.
The development and research of micro and nanostructures for the manufacture of ultrasonic piezoacoustic elements has been carried out. The structures obtained in this work have practical applications for the manufacture of piezoelectric and piezoacoustic elements, in particular, for using in liquid flowmeters as receivers and emitters of an ultrasonic signal. A structure of nanocells was obtained that was different from standard piezoelectric elements (disk, cylinder), but with the same coefficients, characteristics, and radiation pattern.
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