Effect of Ti-Al cathode composition on plasma generation and plasma transport in direct current vacuum arc Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method A magnetized hydrogen plasma beam was generated with a cascaded arc, expanding in a vacuum vessel at an axial magnetic field of up to 1.6 T. Its characteristics were measured at a distance of 4 cm from the nozzle: up to a 2 cm beam diameter, 7.5ϫ 10 20 m −3 electron density, ϳ2 eV electron and ion temperatures, and 3.5 km/ s axial plasma velocity. This gives a 2.6ϫ 10 24 H + m −2 s −1 peak ion flux density, which is unprecedented in linear plasma generators. The high efficiency of the source is obtained by the combined action of the magnetic field and an optimized nozzle geometry. This is interpreted as a cross-field return current that leads to power dissipation in the beam just outside the source.

The operation of a cascaded arc hydrogen plasma source was experimentally investigated to provide an empirical basis for the scaling of this source to higher plasma fluxes and efficiencies. The flux and efficiency were determined as a function of the input power, discharge channel diameter, and hydrogen gas flow rate. Measurements of the pressure in the arc channel show that the flow is well described by Poiseuille flow and that the effective heavy particle temperature is approximately 0.8 eV. Interpretation of the measured I -V data in terms of a one-parameter model shows that the plasma production is proportional to the input power, to the square root of the hydrogen flow rate, and is independent of the channel diameter. The observed scaling shows that the dominant power loss mechanism inside the arc channel is one that scales with the effective volume of the plasma in the discharge channel. Measurements on the plasma output with Thomson scattering confirm the linear dependence of the plasma production on the input power. Extrapolation of these results shows that ͑without a magnetic field͒ an improvement in the plasma production by a factor of 10 over where it was in van Rooij et al. ͓Appl. Phys. Lett. 90, 121501 ͑2007͔͒ should be possible.

A potential buildup in front of a magnetized cascaded arc hydrogen plasma source is explored via E x B rotation and plate potential measurements. Plasma rotation approaches thermal speeds with maximum velocities of 10 km/s. The diagnostic for plasma rotation is optical emission spectroscopy on the Balmer-beta line. Asymmetric spectra are observed. A detailed consideration is given on the interpretation of such spectra with a two distribution model. This consideration includes radial dependence of emission determined by Abel inversion of the lateral intensity profile. Spectrum analysis is performed considering Doppler shift, Doppler broadening, Stark broadening, and Stark splitting.

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