Phase selective growth of rhombohedral and cubic indium oxide polytypes was studied. The selective growth of different polytypes was achieved by adjusting substrate temperature and trimethylindium flow rate during metal organic chemical vapor deposition on c-plane sapphire. The optical band gaps of the cubic and rhombohedral phases were determined to be ∼3.7 and ∼3.0eV, respectively. On the basis of the performed structural investigations, a phenomenological model of the nucleation and growth of highly textured cubic In2O3 on Al2O3 (0001) is proposed.

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A room temperature ozone induced oxidation of thin InN films is proposed to improve the electric transport properties. The sheet carrier density is reduced upon oxidation by a value which is in the order of the electron concentration of an untreated InN surface. Thus, ozone effectively passivates the surface defect states on InN and might be an effective method to prepare InN films for electronic applications. A model for the improved electron transport properties is proposed taking into account the decreased surface band bending and the decreased influence of surface electrons on the net mobility of InN layers.

In 2 O 3 nanoparticles were synthesized at low substrate temperatures by the metal organic chemical vapor deposition technique. Nanoparticles with a mean diameter from 3 to 33 nm can be obtained by varying the growth temperature. Photoreduction and oxidation studies were carried out for particle-containing layers exhibiting a resistance change of more than five orders of magnitude after ultraviolet irradiation and oxidation by ozone. A grain boundary model was proposed to understand the photoreduction and oxidation mechanism for the nanoparticle layers. It was suggested that by photoreduction the nanoparticles are reactivated throughout the layer. The Schottky barrier between the nanoparticles decreases inducing a reduction of the space-charge-limited region. After oxidation, a completely depleted space-charge region covering the whole volume of In2O3 nanoparticles is formed. Furthermore, the bulk diffusion process dominates the response of thick layers during the oxidation process. By decreasing the layer thickness down to 10 nm, surface effects dominate, resulting in an ultrafast response to changes in ozone concentration. The typical response time of very thin In2O3 nanoparticle layers was determined to be less than 1 s.