EFAB @lectrochemical mrication) is a new micromachining technology targeted at the rapid. automated batch fabrication of an unlimited variety of hgh-aspect-ratio metallic microstructures. By applying the principles of Solid Freeform Fabrication to the manufacturing of microstructures, EFAB provides nearly arbitmy, truly 3-D geometry. EFAB exploits "Instant Masking"-+ new high-speed in-situ selective plating technique40 quickly, repeatably, and precisely deposit an unlimited number of layers of material. EFAB makes possible economical prototype and short run production of microstructures using inexpensive desktop equipment, yet is scalable to mass production. By genemting layers using electrodeposition at low temperature, EFAB makes feasible the manufacture of extremely complex microsmctum that are deposited over and electrically integrated with standard foundry-processed ICs.
Purpose -The purpose of this paper is to familiarize the reader with the capabilities of EFAB technology, a unique additive manufacturing process which yields fully assembled, functional mechanisms from metal on the micro to millimeter scale, and applications in medical devices. Design/methodology/approach -The process is based on multi-layer electrodeposition and planarization of at least two metals: one structural and one sacrificial. After a period of initial commercial development, it was scaled up from a prototyping-only to a production process, and biocompatible metals were developed for medical applications. Findings -The process yields complex, functional metal micro-components and mechanisms with tight tolerances from biocompatible metals, in lowhigh production volume. Practical implications -The process described has multiple commercial applications, including minimally invasive medical instruments and implants, probes for semiconductor testing, military fuzing and inertial sensing devices, millimeter wave components, and microfluidic devices. Originality/value -The process described in this paper is unusual among additive fabrication processes in being able to manufacture in high volume, and in its ability to produce devices with microscale features. It is one of only a few additive manufacturing processes that can produce metal parts or multi-component mechanisms.
EFAB (“Electrochemical FABrication”) is a new micromachining process utilizing an innovative “Instant Masking” (IM) technique to electrochemically deposit an unlimited number of metal layers for microfabrication. Through this approach, high-aspect-ratio microstructures with arbitrary 3-D geometry can be rapidly and automatically batch-fabricated at low temperature (< 60 °C) using an inexpensive desktop machine. IC-MEMS integration can also be carried out by this low temperature process.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.