The formation of inhibitive benzotriazole films on copper and copper alloyed with silver has been studied with scanning electrochemical microscopy ͑SECM͒ and X-ray photoelectron spectroscopy ͑XPS͒. The SECM measurements showed that the film grows rapidly on oxygen-free dehydrated copper ͑OF-HC͒ and that the rate depends on the substrate potential. The benzotriazole films were also observed on silver alloyed copper; however, electropolishing prevents film growth by enriching the surface with silver. XPS results show that the film consisted of ͓Cu͑I͒-BTA͔ on both materials. No evidence of ͓Ag͑I͒-BTA͔ was found.
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