Highly oriented ZnO films were synthesized successfully on glass, fused quartz, silicon and sapphire substrates with high reproducibility by RF reactive ion plating. Metal zinc was evaporated from an alumina crucible in an RF discharge of oxygen gas at a pressure of 10-4 Torr (10-2 Pa). The piezoelectrical properties of the ZnO films for the surface acoustic wave (SAW) device were evaluated by electrical measurements. The high coupling factor (k) of the ZnO films was measured at between 0.08 and 0.09. The SAW TV-PIF filters fabricated by the ion plated ZnO films were found to be excellent.
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