We have developed a novel method for fabricating a monolayer graphene oxide (GO) film that covers the whole substrate surface or patterned areas by chemically modifying the substrate surface. We discovered that partially surface-bound GO flakes are decomposed into surface-bound flakes and free flakes by sonication, the latter of which can be easily removed. This mechanism enables us to fabricate regularly patterned GO films from irregularly shaped GO flakes. We also found that the morphology and conduction properties of the monolayer GO films are improved by annealing in CH 4 atmosphere.
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